JPH0420853B2 - - Google Patents

Info

Publication number
JPH0420853B2
JPH0420853B2 JP58198268A JP19826883A JPH0420853B2 JP H0420853 B2 JPH0420853 B2 JP H0420853B2 JP 58198268 A JP58198268 A JP 58198268A JP 19826883 A JP19826883 A JP 19826883A JP H0420853 B2 JPH0420853 B2 JP H0420853B2
Authority
JP
Japan
Prior art keywords
silica
synthetic quartz
gas
chlorine
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58198268A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6090836A (ja
Inventor
Haruo Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP19826883A priority Critical patent/JPS6090836A/ja
Publication of JPS6090836A publication Critical patent/JPS6090836A/ja
Publication of JPH0420853B2 publication Critical patent/JPH0420853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)
JP19826883A 1983-10-25 1983-10-25 合成石英の製造方法 Granted JPS6090836A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19826883A JPS6090836A (ja) 1983-10-25 1983-10-25 合成石英の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19826883A JPS6090836A (ja) 1983-10-25 1983-10-25 合成石英の製造方法

Publications (2)

Publication Number Publication Date
JPS6090836A JPS6090836A (ja) 1985-05-22
JPH0420853B2 true JPH0420853B2 (en]) 1992-04-07

Family

ID=16388307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19826883A Granted JPS6090836A (ja) 1983-10-25 1983-10-25 合成石英の製造方法

Country Status (1)

Country Link
JP (1) JPS6090836A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01138145A (ja) * 1987-08-20 1989-05-31 Shin Etsu Chem Co Ltd 合成石英ガラス部材の製造方法
JPH0394843A (ja) * 1989-09-04 1991-04-19 Shin Etsu Chem Co Ltd 合成石英ガラスるつぼおよびその製造方法
US5043002A (en) 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
JP2588447B2 (ja) * 1991-06-29 1997-03-05 信越石英株式会社 エキシマレーザー用石英ガラス部材の製造方法
JP3175247B2 (ja) * 1991-12-16 2001-06-11 住友電気工業株式会社 光ファイバ用多孔質母材の加熱透明化方法
JPH11116247A (ja) * 1997-10-09 1999-04-27 Nikon Corp 合成石英ガラス製造方法
JP4640293B2 (ja) * 2006-08-24 2011-03-02 住友電気工業株式会社 石英ガラス体製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925741B2 (ja) * 1980-03-04 1984-06-20 日本電信電話株式会社 多成分系ガラスフアイバ母材の製造方法

Also Published As

Publication number Publication date
JPS6090836A (ja) 1985-05-22

Similar Documents

Publication Publication Date Title
CA2037102C (en) Method of making fused silica
KR0130007B1 (ko) 유리질실리카제품 및 그 제조방법
JP3233298B2 (ja) 高純度溶融シリカガラスの非多孔質物体を作成する方法
US5703191A (en) Method for purifying polyalkylsiloxanes and the resulting products
JP3796565B2 (ja) 球状シリカ微粒子の製造方法
US6312656B1 (en) Method for forming silica by combustion of liquid reactants using oxygen
KR100473827B1 (ko) 액체반응물의연소에의해용융실리카를제조하는방법및장치
US5879649A (en) Method for purifying polyalkylsiloxanes and the resulting products
EP0529190A1 (en) Method of making titania-doped fused silica
JPH0138063B2 (en])
JP2001524064A (ja) ゲルマニウム添加シリカ形成供給原料および方法
EP0146659A1 (en) A method for the preparation of synthetic quartz glass suitable as a material of optical fibers
JPH0420853B2 (en])
KR20000052522A (ko) 유기실란의 분해에 의한 실리카 제조방법
JPH0459254B2 (en])
JPS629536B2 (en])
JPH0459253B2 (en])
JP3417962B2 (ja) 合成石英ガラス部材の製造方法
JPH0460057B2 (en])
JP2001151513A (ja) アルミニウム添加石英系多孔質母材の製造方法
JPS638054B2 (en])
AU638702C (en) Vitreous silica products